精密空气轴承旋转台

Rotary Stage

主要参数

型号	Rotary Stage RT075S	Rotary Stage RT100S	Rotary Stage RT150S	Rotary Stage RT150U	Rotary Stage RT250S	Rotary Stage RT500S
Max. axial load 最大轴负载	137 N	206 N	434 N	726 N	804 N	8300 N
Max. radial load 最大侧向负载	51 N	78 N	226 N	264 N	452 N	2570 N
Axial stiffness 轴刚性	68 N/µm	103 N/μm	217 N/μm	242 N/µm	402 N/μm	1660 N/μm
Radial stiffness 侧向刚性	25 N/µm	39 N/μm	113 N/μm	88 N/µm	226 N/μm	514 N/μm
Tilt stiffness 摇摆刚性	33 Nm/mrad	90 Nm/mrad	455 Nm/mrad	204 Nm/mrad	2380 Nm/mrad	37,4 Nm/µrad
Radial error motion 端跳误差	< 100 nm LSC	< 100 nm LSC	< 100 nm LSC	< 20 nm LSC	< 100 nm LSC	< 100 nm LSC
Axial error motion 轴误差	< 50 nm LSC	< 50 nm LSC	< 50 nm LSC	< 20 nm LSC	< 50 nm LSC	< 50 nm LSC
Air consumption 耗气量	< 4 Nl/min	< 8 Nl/min	< 10 Nl/min	< 20 Nl/min	< 15 Nl/min	< 100 Nl/min
Total mass 重量	0,6 kg	1,6 kg	4,0 kg	15,2 kg	16,5 kg	175 kg
Encoder 编码器	11840 periods	15744 periods	23600 periods	23600 periods	40000 periods	47200 periods
Nominal torque 标称扭矩	0,04 Nm	0,13 Nm	0,45 Nm	0,5 Nm	1,5 Nm	3,0 Nm
Peak torque 峰值扭矩	0,13 Nm	0,4 Nm	1,35 Nm	1,5 Nm	4,5 Nm	9,0 Nm
Max. speed 最大速度	300 rpm	200-1200 rpm	200-800 rpm	200 rpm	120 rpm	60 rpm
Angular accuracy 角精度	13,8 arcsec	10,3 arcsec	6,9 arcsec	6,9 arcsec	4,0 arcsec	2,9 arcsec
Material 材料	coated aluminium	coated aluminium	coated aluminium	stainless steel	coated aluminium	stainless steel