HEXAPOD六自由度定位系统应用

————同步辐射

衍射仪

 

SYNCHROTRON DIFFRACTOMETER

 

一个CEA-CNRS(法国国家科学研究中心)的联合研究小组在位于Grenoble的ESRF同步辐射中心设计了一套大尺寸衍射仪，用于研究生厂过程中的表面纳米结构。

  •  传感臂角速度20度/秒
  •  样品空间不确定度（Sphere of confusion）:50μm
  •  传感器空间不确定度（Sphere of confusion）:100μm
  •  内置一套BREVA系统，用于样品定位
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PROJECT CONTEXT

The ESRF synchrotron leases the most advanced equipment allowing industrial and research organizations to perform their atomic scale experiments.

The CRG-IF BM32 beamline is specialized in studying interfaces and surfaces at air or under ultra high vacuum by X-ray scattering techniques.

This beamline is dedicated to a team composed of scientists from the Atomic Energy Commission (CEA) and the French National Centre for Scientific Research (CNRS).

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CUSTOMER REQUEST

The joint CEA-CNRS team used a 20 years old diffractometer to study nano structures on surfaces during their growth. They chose SYMETRIE to provide a more powerful machine. The new diffractometer performs 2 main functions :

► Sample positioning: The sample is adjusted on the beam trajectory and can move around 6 degrees of freedom, thanks to a BREVA hexapod, to adjust the angle of incidence of the beam.

► Detector positioning: To gather the diffracted X-rays characterizing the crystallographic structure of the sample, a detector moves freely on a spherical surface around the sample.

SPECIFICITIES

► Easy access to the UHV chamber
► Arm detector angular speed: 20°/s
► Sphere of confusion sample: 50 µm
► Sphere of confusion detector: 100 µm
► BREVA hexapod resolution: 1 µm, 0.001°